People
J Provine

J Provine

Affiliation

Senior Research Engineer in the Department of Mechanical Engineering, Stanford University

Address

Stanford University
Building/Rm: Others
Stanford, CA 94305

E-Mail

Education

  • Ph.D, Cornell University, Electrical Engineering, 2005
  • MEE, Rice University, Electrical Engineering, 1999
  • BS, Rice University, Electrical Engineering, 1999
  • BA, Rice University, Physics, 1998

Academic Interests

  • Interfacial Forces
  • Atomic Layer Deposition
  • NanoElectroMechanical Systems
  • Nanofabrication
  • Nanophotonics

Personal Interests

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  • Music / DJing
  • Sports: Basketball, Racquetball
  • Movies
  • Books

References

37 document(s) found.
[1] [2] [3] [4]

J. Provine, Peter Schindler, Yongmin Kim, Steve P. Walch, Hyo Jin Kim, Ki-Hyun Kim, and Fritz B. Prinz, "Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride", AIP Advances, vol. 6, pp. 65012-65012, 2016.
Yongmin Kim, J. Provine, Stephen P. Walch, Joonsuk Park, Witchukorn Phuthong, Anup L. Dadlani, Hyo-Jin Kim, Peter Schindler, Kihyun Kim, and Fritz B. Prinz, "Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid", ACS Appl. Mater. Interfaces, vol. 8 (27), pp. 17599-17605, 2016.
Yongmin Kim, Peter Schindler, Anup L. Dadlani, Shinjita Acharya, J. Provine, Jihwan An, Fritz B. Prinz, "Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation ", Acta Materialia, vol. 117, pp. 153-159, 2016.
Dickson Thian, Yonas T. Yemane, Manca Logar, Shicheng Xu, Peter Schindler, Martin M. Winterkorn, J Provine, and Fritz B. Prinz, "Atomically Flat Silicon Oxide Monolayer Generated by Remote Plasma", Journal of Physical Chemistry C, vol. 120 (15), pp. 8148-8156, 2016.
J Provine, P. Schindler, H.K. Kim, J. Torgersen, H.-P. Karnthaler, F.B. Prinz, "Atomic Layer Deposition by Reaction of Molecular Oxygen with Tetrakisdimethylamido-metal Precursors", Journal of Vacuum Society of America A, vol. 34, 2016.
M M Winterkorn, A L Dadlani, Y Kim, J Provine, FB Prinz, "ETCH “sandbox”: Controlled release dimensions through atomic layer deposition etch stop with trench refill and polish", 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 2272-2275, 2015.
S. Dumpala, S.R. Broderick, U. Khalilov, E.C. Neyts, A.C.T. van Duin, J Provine, R.T. Howe, K. Rajan, "Integrated Atomistic Chemical Imaging and ReaxFF Molecular Dynamic Simulations on Silicon Oxidation", Applied Physics Letters, vol. 106, p. 11602, 2015.
W. Song, R. Gatdula, S. Abbaslou, M. Lu, A. Stein, W.Y.-C. Lai, J Provine, R.F.W. Pease, D.N. Chistodoulides, W. Jiang, "High-Density Waveguide Superlattices with Low Crosstalk", Nature Communications, vol. 6, p. 7027, 2015.
H. Yuan, S. Chang, I. Bargatin, N. Wang, D. Riley, H. Wang, J. Schwede, J Provine, E. Pop, Z.-X. Shen, P. Pianetta, N. Melosh, R.T. Howe, "Engineering Ultra-Low Work Function of Graphene", ACS Nanoletters, vol. 15, pp. 6475-6480, 2015.
Peter Schindler, Manca Logar, J Provine, and Fritz B. Prinz, "Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition", Langmuir, vol. 31, pp. 5057-5062, 2015.
[1] [2] [3] [4]


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