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305 document(s) found.
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Ioannis Petousis, Wei Chen, Geoffroy Hautier, Tanja Graf, Thomas D. Schladt, Kristin A. Persson, and Fritz B. Prinz, "Benchmarking density functional perturbation theory to enable high-throughput screening of materials for dielectric constant and refractive index", Phys. Rev. B, vol. 93, p. 115151, 2016.
J. Provine, Peter Schindler, Yongmin Kim, Steve P. Walch, Hyo Jin Kim, Ki-Hyun Kim, and Fritz B. Prinz, "Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride", AIP Advances, vol. 6, pp. 65012-65012, 2016.
Yongmin Kim, J. Provine, Stephen P. Walch, Joonsuk Park, Witchukorn Phuthong, Anup L. Dadlani, Hyo-Jin Kim, Peter Schindler, Kihyun Kim, and Fritz B. Prinz, "Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid", ACS Appl. Mater. Interfaces, vol. 8 (27), pp. 17599-17605, 2016.
Yongmin Kim, Peter Schindler, Anup L. Dadlani, Shinjita Acharya, J. Provine, Jihwan An, Fritz B. Prinz, "Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation ", Acta Materialia, vol. 117, pp. 153-159, 2016.
Anup Lal Dadlani, Shinjita Acharya, Orlando Trejo, Fritz B Prinz, Jan Torgersen, "ALD Zn (O, S) thin films’ interfacial chemical and structural configuration probed by XAS", Applied Materials and Interfaces, vol. 8, pp. 14323-14327, 2016.
Dickson Thian, Yonas T. Yemane, Manca Logar, Shicheng Xu, Peter Schindler, Martin M. Winterkorn, J Provine, and Fritz B. Prinz, "Atomically Flat Silicon Oxide Monolayer Generated by Remote Plasma", Journal of Physical Chemistry C, vol. 120 (15), pp. 8148-8156, 2016.
Jan Torgersen, Shinjita Acharya, Anup Lal Dadlani, Ioannis Petousis, Yongmin Kim, Orlando Trejo, Dennis Nordlund, Fritz Prinz, "Relating Electronic and Geometric Structure of Atomic Layer Deposited BaTiO3 to its Electrical Properties.", Journal of Physical Chemistry Letters, vol. 7, pp. 1428-1433, 2016.
Shicheng Xu, Anup L. Dadlani, Shinjita Acharya, Peter Schindler, Fritz B. Prinz, "Oscillatory barrier assisted Langmuir-Blodgett deposition of large scale quantum dot monolayers", Applied Surface Science, vol. 367, pp. 500-506, 2016.
Shinjita Acharya, Jan Torgersen, Yongmin Kim , Joonsuk Park , Peter Schindler , Anup L. Dadlani , Martin Winterkorn , Shicheng Xu , Stephen P. Walch , Takane Usui , Christian Schildknecht and Fritz B. Prinz , "Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor", Journal of Material Chemistry C, vol. 4, pp. 1945-1952, 2016.
J Provine, P. Schindler, H.K. Kim, J. Torgersen, H.-P. Karnthaler, F.B. Prinz, "Atomic Layer Deposition by Reaction of Molecular Oxygen with Tetrakisdimethylamido-metal Precursors", Journal of Vacuum Society of America A, vol. 34, 2016.
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