Nanoscale Prototyping Laboratory for Energy Conversion and Storage

Nanoscale Prototyping
Laboratory

for
Energy Conversion and Storage

People

Martin Winterkorn

Address

Stanford University
Building/Rm: 530 - 205
Stanford, CA 94305

Work Phone: admin

References

3 document(s) found.

[1]

Dickson Thian, Yonas T. Yemane, Manca Logar, Shicheng Xu, Peter Schindler, Martin M. Winterkorn, J Provine, and Fritz B. Prinz, "Atomically Flat Silicon Oxide Monolayer Generated by Remote Plasma", Journal of Physical Chemistry C, vol. 120 (15), pp. 8148-8156, 2016.

Shinjita Acharya, Jan Torgersen, Yongmin Kim , Joonsuk Park , Peter Schindler , Anup L. Dadlani , Martin Winterkorn , Shicheng Xu , Stephen P. Walch , Takane Usui , Christian Schildknecht and Fritz B. Prinz , "Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor", Journal of Material Chemistry C, vol. 4, pp. 1945-1952, 2016.

M M Winterkorn, A L Dadlani, Y Kim, J Provine, FB Prinz, "ETCH “sandbox”: Controlled release dimensions through atomic layer deposition etch stop with trench refill and polish", 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 2272-2275, 2015.

[1]

Also see the Alumni Page.