People

RPL Alumni

Peter Schindler

Address

E-Mail

References

12 document(s) found.
[1] [2]

J. Provine, Peter Schindler, Yongmin Kim, Steve P. Walch, Hyo Jin Kim, Ki-Hyun Kim, and Fritz B. Prinz, "Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride", AIP Advances, vol. 6, pp. 65012-65012, 2016.
Yongmin Kim, J. Provine, Stephen P. Walch, Joonsuk Park, Witchukorn Phuthong, Anup L. Dadlani, Hyo-Jin Kim, Peter Schindler, Kihyun Kim, and Fritz B. Prinz, "Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid", ACS Appl. Mater. Interfaces, vol. 8 (27), pp. 17599-17605, 2016.
Yongmin Kim, Peter Schindler, Anup L. Dadlani, Shinjita Acharya, J. Provine, Jihwan An, Fritz B. Prinz, "Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation ", Acta Materialia, vol. 117, pp. 153-159, 2016.
Dickson Thian, Yonas T. Yemane, Manca Logar, Shicheng Xu, Peter Schindler, Martin M. Winterkorn, J Provine, and Fritz B. Prinz, "Atomically Flat Silicon Oxide Monolayer Generated by Remote Plasma", Journal of Physical Chemistry C, vol. 120 (15), pp. 8148-8156, 2016.
Shicheng Xu, Anup L. Dadlani, Shinjita Acharya, Peter Schindler, Fritz B. Prinz, "Oscillatory barrier assisted Langmuir-Blodgett deposition of large scale quantum dot monolayers", Applied Surface Science, vol. 367, pp. 500-506, 2016.
Shinjita Acharya, Jan Torgersen, Yongmin Kim , Joonsuk Park , Peter Schindler , Anup L. Dadlani , Martin Winterkorn , Shicheng Xu , Stephen P. Walch , Takane Usui , Christian Schildknecht and Fritz B. Prinz , "Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor", Journal of Material Chemistry C, vol. 4, pp. 1945-1952, 2016.
J Provine, P. Schindler, H.K. Kim, J. Torgersen, H.-P. Karnthaler, F.B. Prinz, "Atomic Layer Deposition by Reaction of Molecular Oxygen with Tetrakisdimethylamido-metal Precursors", Journal of Vacuum Society of America A, vol. 34, 2016.
A. Dadlani, O.Trejo, S. Acharya, J. Torgersen, I. Petousis, D. Nordlund, R. Sarangi, P. Schindler, F. Prinz, "Exploring local electronic structure and geometric arrangement of ALD Zn(O,S) buffer layers using X-Ray Absorption spectroscopy", Journal of Materials Chemistry C, vol. 3, pp. 12192-12198, 2015.
Peter Schindler, Manca Logar, J Provine, and Fritz B. Prinz, "Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition", Langmuir, vol. 31, pp. 5057-5062, 2015.
Peter Schindler, Yongmin Kim, Dickson Thian, Jihwan An, Fritz B. Prinz, "Plasma-enhanced atomic layer deposition of BaTiO3", Scripta Materialia, 2015.
[1] [2]